data mining and visualisation

• fast and flexible processing, validation and visualization of large historical data sets
• context-dependent visualization of tool and metrology data, product parameters and yield
• enhanced exploratory and statistical data analysis for supervision, fault detection and virtual metrology
• high dimensional sensor data analysis (OES, NIR, Fluorescence) with multivariate methods
  (multiway-PCA, EFA, EWFA) and FFT
• data processing, signal analysis and modelling for APC (advanced process control) and
  SPC (statistical process control)
• linear and nonlinear modelling, prediction and fault detection
• design of experiments (DoE)